The Secretaries of State Joachim Werren (Economy) and Dr. Josef Lange (Science) awarded the Lower Saxony Co-operation Awards 2003 during “Hannover Messe 2004”, the biggest industry fair worldwide, on 21 April 2004.
With the awards which have been taken place for the fourth time now exceptionally successful and innovatie co-operation projects between regional enterprises and Universities or other research institutes are being honoured. “The target of the Lower Saxonian innovation policy is to intensify the teamwork between Universities and privately owned enterprises in order to strengthen the competitiveness of regional manufacturers and create job oportunities” says Secretary of Science Lange. “The nominated projects once more show the potential of Lower Saxony as site for research and economy” emphasizes Secretary of Economics Werren.
The 1st prize and 25.000 Euro goes to the co-operation project of phoenix|x-ray Systems + Services GmbH and Laser Zentrum Hannover. Target of the co-operation was to develop a compact source for radiation in the extreme ultraviolett spectrum (EUV) with a wave length of 13.5 nanometers. EUV is a soft X-ray radiation which can be used for metrologic purposes in the semiconductor industry and different fields of basic research.
Another result of the co-operation was the establishment of a joint venture enterprise in July 2003, phoenix|euv Systems + Services GmbH wich is now industrially manufacturing and distributing EUV tubes.
Meanwhile the first EUV sources of the young company have been installed and proven their practical use in industry and research. One main application of the future will be the calibration of microlithography systems for the realisation of structures below 32 nanometers in die production.