A new benchmark in image resolution has been set by the phoenix|x-ray nanofocus X-ray tube which had been launched mid of 2001 and has been available as part of the analyser|series since September.
The tube offers a detail detectability of down to 0.5 micrometers (500 nanometers) for the inspection of finest structures e.g. cracks in bond wires or failures in the metallisation of microvias.
Due to the sharp image achieved through nanofocus technology "regular" inspection tasks can be performed very neatly.
The resolution depends of the size of the focal spot that could be brought down to as little as <1 micrometer for this special tube.
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Image caption: Thermically destroyed bond wire in side view